• Infrared and Laser Engineering
  • Vol. 46, Issue 12, 1222002 (2017)
Li Wenjie1、2、*, Zhao Duliang1、2, Lin Ying1, Liang Xu1, and Fang Xiaodong1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/irla201746.1222002 Cite this Article
    Li Wenjie, Zhao Duliang, Lin Ying, Liang Xu, Fang Xiaodong. Design of highly sensitive on-line detecting system for ultraviolet pulse lasers energy[J]. Infrared and Laser Engineering, 2017, 46(12): 1222002 Copy Citation Text show less

    Abstract

    A kind of ultraviolet pulse laser energy detection system based on PIN photodiode was introduced. Firstly, the light outside main optical path was used to realize nondestructive and real-time pulse energy detecting. Secondly, high-speed and high-precision integral circuit was designed to process photocurrent signal for voltage peak. Finally, the synchronous trigger signal of laser system was used for timing sequence design. Thus, the accurate voltage difference was obtained and the exact laser pulse energy can be calculated. Tested on 248 nmKrF and 308 nmXeCl excimer laser, the real-time nondestructive measuring was realized while the laser ran in a pulse repetition mode up to 200 Hz. The relevance and repeatability of the measuring data were in accordance with the results of the external energy meter of output end and the system meets the application requirements.
    Li Wenjie, Zhao Duliang, Lin Ying, Liang Xu, Fang Xiaodong. Design of highly sensitive on-line detecting system for ultraviolet pulse lasers energy[J]. Infrared and Laser Engineering, 2017, 46(12): 1222002
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