Jianwei ZHANG, Yongqiang NING, Xing ZHANG, Yinli ZHOU, Chao CHEN, Hao WU, Li QIN, Lijun WANG. Development and Future of Vertical Cavity Surface Emitting Lasers Operated at High Temperatures（Invited）[J]. Acta Photonica Sinica, 2022, 51(2): 0251201
- Acta Photonica Sinica
- Vol. 51, Issue 2, 0251201 (2022)
Fig. 1. The 3D schematic of VCSEL structure
Fig. 2. Reflective spectra of 22-pair DBR consisted of GaAs and AlAs materials
Fig. 3. The Gain spectra of active region andcavity mode changing with operation temperatures，and thered solid circle indicated the cavity-mode gain at different temperatures［33］
Fig. 5. The physical components of chip scale atomic clock［21］
Fig. 6. The external-cavity VCSEL operated under high temperatures and its linewidth［52］
Fig. 7. The VCSEL integrated with grating structure，which is used to control the mode and polarization of VCSEL，reported by ULM university［56］
Fig. 8. The inter-contact VCSEL structure reported by Ioffe institute and its diamond-shape oxide aperture［38］
Fig. 9. Theelliptical surface shallow integrated on the VCSEL surface，reported by CIOMP（Changchun Institute of Optics，Fine Mechanics and Physics）［66］
Fig. 10. The schematic diagram of VCSEL reported by CIOMP，emitting high single-mode power［69］
Fig. 11. The VCSEL mesa with closeisolation trench，reported by Suzhou Institute of Nano-Tech and Nano-Bionics［71］
Fig. 12. The schematic structure of an oxide-confined VCSEL incorporating a built-inindex guide，reported by Institute of Semiconductors［74］
Fig. 13. Proportion of energy consumption in data center
Fig. 14. The schematic structure of high-speed 980 nm VCSEL used for the optical inter-connections［82］
Fig. 15. Schematic diagram and top view of VCSELs with different Zn diffusion diameters［86］
Fig. 16. The integrated high-speed VCSEL module reported by IMB and CUT［90］
Fig. 17. Schematicdiagram of VCSELs with Zn diffusion［91］
Fig. 18. The SEM image of high-speed VCSELs［92］
|
Table 1. The research development of high-temperature and high-speed VCSELs
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20