• Journal of Infrared and Millimeter Waves
  • Vol. 40, Issue 4, 432 (2021)
Chang-He ZHOU1、2、*, Jian-Rong YANG2, Mei-Hua ZHOU2, and Chao XU2
Author Affiliations
  • 1University of Chinese Academy of Sciences, Beijing 100049, China
  • 2Key Laboratory of Infrared Imaging Materials and Devices, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
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    DOI: 10.11972/j.issn.1001-9014.2021.04.002 Cite this Article
    Chang-He ZHOU, Jian-Rong YANG, Mei-Hua ZHOU, Chao XU. Correlation between Everson etch pits and material defects of (112) B CdZnTe substrates[J]. Journal of Infrared and Millimeter Waves, 2021, 40(4): 432 Copy Citation Text show less
    Everson etch pits of different shapes on CdZnTe (112)B surface
    Fig. 1. Everson etch pits of different shapes on CdZnTe (112)B surface
    Changes of etch pit geometries and positions on the (112) B surface during secondary etching
    Fig. 2. Changes of etch pit geometries and positions on the (112) B surface during secondary etching
    Relations of etch pits on the (112)B surface and flat-bottom etch pits with different D/Ws on the (111)B surface (a) micrographs of etch pits with different D/Ws on the (111)B surface, (b) schematic diagrams of flat-bottom etch pits sectioned by (112) plane, (c) micrographs of etch pits observed on the (112)B surface coinciding with the geometries in (b)
    Fig. 3. Relations of etch pits on the (112)B surface and flat-bottom etch pits with different D/Ws on the (111)B surface (a) micrographs of etch pits with different D/Ws on the (111)B surface, (b) schematic diagrams of flat-bottom etch pits sectioned by (112) plane, (c) micrographs of etch pits observed on the (112)B surface coinciding with the geometries in (b)
    Pyramidal etch pits of extending defects oriented in and on the (111)B surface (a) [101] orietation, (b) [011] orientation, (c) [110] orientation, (d) [211] orientation, (e) [121] orientation, (f) [112] orientation
    Fig. 4. Pyramidal etch pits of extending defects oriented in <110> and <112> on the (111)B surface (a) [101] orietation, (b) [011] orientation, (c) [110] orientation, (d) [211] orientation, (e) [121] orientation, (f) [112] orientation
    Typical Everson etch pits on CdZnTe (112)B surface (a) extending defects, (b) extending defects, (c) extending defects
    Fig. 5. Typical Everson etch pits on CdZnTe (112)B surface (a) <110> extending defects, (b) <112> extending defects, (c) <123> extending defects
    Orientation distributions of the extending defects in CdZnTe substrate samples on the (112) polar figure. The diamond points are the orientations of the extending defects observed by etch pit real-time observation technology on the (111)A surfaces . The observed area of the samples is 897.7 µm × 670 µm (a) sample M4834, (b) sample K4911
    Fig. 6. Orientation distributions of the extending defects in CdZnTe substrate samples on the (112) polar figure. The diamond points are the orientations of the extending defects observed by etch pit real-time observation technology on the (111)A surfaces . The observed area of the samples is 897.7 µm × 670 µm (a) sample M4834, (b) sample K4911
    Chang-He ZHOU, Jian-Rong YANG, Mei-Hua ZHOU, Chao XU. Correlation between Everson etch pits and material defects of (112) B CdZnTe substrates[J]. Journal of Infrared and Millimeter Waves, 2021, 40(4): 432
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