Review on Wet Etching Technique of Fused Silica Optical Elements

Yuhan Li; Huapan Xiao; Hairong Wang; Xiaoya Liang; Changpeng Li; Xin Ye; Xiaodong Jiang; Xinxiang Miao; Caizhen Yao; Laixi Sun

doi:10.3788/LOP202158.1516026

Journals >Laser & Optoelectronics Progress >Volume 58 >Issue 15 >Page 1516026 > Article

Laser & Optoelectronics Progress
Vol. 58, Issue 15, 1516026 (2021)

Review on Wet Etching Technique of Fused Silica Optical Elements

Yuhan Li¹, Huapan Xiao², Hairong Wang^1、*, Xiaoya Liang¹, Changpeng Li³, Xin Ye^3、**, Xiaodong Jiang³, Xinxiang Miao³, Caizhen Yao³, and Laixi Sun³

Author Affiliations

¹State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an , Shaanxi 710049, China

²College of Mechanical Engineering, Chongqing University, Chongqing 400044, China

³Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang , Sichuan 621900, China

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DOI: 10.3788/LOP202158.1516026 Cite this Article Set citation alerts

Yuhan Li, Huapan Xiao, Hairong Wang, Xiaoya Liang, Changpeng Li, Xin Ye, Xiaodong Jiang, Xinxiang Miao, Caizhen Yao, Laixi Sun. Review on Wet Etching Technique of Fused Silica Optical Elements[J]. Laser & Optoelectronics Progress, 2021, 58(15): 1516026 Copy Citation Text

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