• Journal of Inorganic Materials
  • Vol. 36, Issue 5, 479 (2021)
Hanxiang JIA1、2, Zewei SHAO1、2, Aibin HUANG1, Pingshi JIN1, and Xun CAO1、*
Author Affiliations
  • 11. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
  • 22. University of Chinese Academy of Sciences, Beijing 100049, China
  • show less
    DOI: 10.15541/jim20200633 Cite this Article
    Hanxiang JIA, Zewei SHAO, Aibin HUANG, Pingshi JIN, Xun CAO. Sandwich Structured Electrolyte of High Sputtering Efficiency for All-solid-state Electrochromic Devices by Optical Design[J]. Journal of Inorganic Materials, 2021, 36(5): 479 Copy Citation Text show less
    AFM image of LiAlOx layer (a) and Ta2O5 layer (b) of sandwich structured electrolyte (ATA), cross-section SEM image of ATA (c) and partial enlarged detail of it (d), surface SEM image of ATA (e), and element distribution of cross-section of ECDs (f)
    1. AFM image of LiAlOx layer (a) and Ta2O5 layer (b) of sandwich structured electrolyte (ATA), cross-section SEM image of ATA (c) and partial enlarged detail of it (d), surface SEM image of ATA (e), and element distribution of cross-section of ECDs (f)
    UV-Vis-NIR spectra (a) of Ta2O5 films deposited under different O2 ratios of 0, 5%, 10%, 15%, respectively, optical modulation (b) of ECDs during -3 V to 3 V, experimental (c) and calculated (d) transmittance spectra of sandwich structured electrolyte, in which S1 and S2 refer to two parallel samples, LAO refers to LiAlOx, TO refer to Ta2O5, and LTO refer to Li+-inserted Ta2O5, optical design for optimized thickness of ATA via software of Essential Macleod (e)
    2. UV-Vis-NIR spectra (a) of Ta2O5 films deposited under different O2 ratios of 0, 5%, 10%, 15%, respectively, optical modulation (b) of ECDs during -3 V to 3 V, experimental (c) and calculated (d) transmittance spectra of sandwich structured electrolyte, in which S1 and S2 refer to two parallel samples, LAO refers to LiAlOx, TO refer to Ta2O5, and LTO refer to Li+-inserted Ta2O5, optical design for optimized thickness of ATA via software of Essential Macleod (e)
    Comparison of sputtering efficiency parameters for several typical layers of ECDs
    3. Comparison of sputtering efficiency parameters for several typical layers of ECDs
    Schematic diagram of the ATA based seven-layer all-solid-state ECDs by optical design (a), color efficiency of ECDs with inset correspond to EC reaction of ECDs (b), switching speed (c) and cycle durability test (d) of ECDs
    4. Schematic diagram of the ATA based seven-layer all-solid-state ECDs by optical design (a), color efficiency of ECDs with inset correspond to EC reaction of ECDs (b), switching speed (c) and cycle durability test (d) of ECDs
    LayerTargetPressure/PaQAr : QO2Power/WThickness/nm
    LiAlOxaLi-Al2.040 : 10200~100
    Ta2O5Ta0.745 : 5200~200
    LiAlOxbLi-Al2.040 : 10200~100
    WOxW1.047 : 370400
    NiONi1.040 : 10100150
    ITOITO0.3100 : 0140400
    Table 1.

    Sputtering parameters for each layer of ECDs

    LayerTargetPower supplyPower density/(W·cm-2)Sputtering rate/(nm·min-1)Sputtering efficiency/((nm·min-1)/(W·cm-2))Ref.
    Ta2O5Ta2O5RF0.572.74.74[23]
    TaDC0.891516.85This work
    LiTaO3LiTaO3RF0.481.22.50[24]
    LiAlOxLi-AlDC0.1616.25This work
    WOxWO3RF1.7852.81[25]
    WDC0.401640This work
    NiONiORF0.643.65.63[26]
    NiDC0.32515.63This work
    Table 2.

    Comparison of sputtering efficiency for several typical systems

    Hanxiang JIA, Zewei SHAO, Aibin HUANG, Pingshi JIN, Xun CAO. Sandwich Structured Electrolyte of High Sputtering Efficiency for All-solid-state Electrochromic Devices by Optical Design[J]. Journal of Inorganic Materials, 2021, 36(5): 479
    Download Citation