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    Journals >Acta Optica Sinica >Volume 5 >Issue 7 >Page 619 > Article
    • Acta Optica Sinica
    • Vol. 5, Issue 7, 619 (1985)
    Sensitivity factor of reflectance to the change of film thickness in ellipsometry
    WANG ZHIGANG and DING LANTING
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    WANG ZHIGANG, DING LANTING. Sensitivity factor of reflectance to the change of film thickness in ellipsometry[J]. Acta Optica Sinica, 1985, 5(7): 619 Copy Citation Text show less
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    WANG ZHIGANG, DING LANTING. Sensitivity factor of reflectance to the change of film thickness in ellipsometry[J]. Acta Optica Sinica, 1985, 5(7): 619
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