Ying Zhang, Jun Wu, Jiangnan Wei, Zuwu Jin, Jianghuai Yao. Optic Fiber Acceleration Sensors Based on Micro-Electromechanical Systems Technology[J]. Acta Optica Sinica, 2018, 38(6): 0606003
- Acta Optica Sinica
- Vol. 38, Issue 6, 0606003 (2018)
Fig. 1. Schematic of MEMS optical fiber acceleration sensor
Fig. 2. Schematic of the overlapped surface of receiving optical fiber
Fig. 3. (a) Diagram of Gaussian beam transmission; (b) mode field distribution on x-z plane
Fig. 4. Schematic of optical transmission
Fig. 5. Cross section of receiving optical fiber mode field on x-z plane. (a1) (a2) Δd=0 μm; (b1) (b2) Δd=2.5 μm; (c1) (c2) Δd=5 μm; (d1) (d2) Δd=7.5 μm; (e1) (e2) Δd=10 μm
Fig. 6. Relationship between light power of receiving optical fiber and shade displacement
Fig. 7. Simulation diagrams of deformations of silicon rectangular beam under different accelerations. (a) a=40 m·s-2; (b) a=80 m·s-2; (c) a=120 m·s-2
Fig. 8. Fitting curve of the deflection of silicon rectangular beam as a function of acceleration
Fig. 9. Fitting curve of light power difference and acceleration of the system
Fig. 10. Structural schematic of platform vibrator
Fig. 11. Frequency response characteristic curve of fiber acceleration sensor
Fig. 12. Fitting curve of fiber acceleration sensor detective value and standard acceleration value
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