• Acta Optica Sinica
  • Vol. 38, Issue 6, 0606003 (2018)
Ying Zhang1、*, Jun Wu1, Jiangnan Wei2, Zuwu Jin1, and Jianghuai Yao1
Author Affiliations
  • 1 College of Electrical Engineering, Yanshan University, Qinhuangdao, Hebei 0 66004, China
  • 2 College of Science, Hebei University of Science and Technology, Shijiazhuang, Hebei 0 50018, China
  • show less
    DOI: 10.3788/AOS201838.0606003 Cite this Article Set citation alerts
    Ying Zhang, Jun Wu, Jiangnan Wei, Zuwu Jin, Jianghuai Yao. Optic Fiber Acceleration Sensors Based on Micro-Electromechanical Systems Technology[J]. Acta Optica Sinica, 2018, 38(6): 0606003 Copy Citation Text show less

    Abstract

    Based on the principle of light intensity modulation and micro-electromechanical system (MEMS) technology, we design a kind of optical fiber acceleration sensor. Two silicon rectangular beams are used as the acceleration sensing elements. According to the relation between the shade displacement and the light power difference of the receiving optical fiber, as well as the relation between the deflection of the silicon rectangular beam at center position and the system acceleration, an expression of acceleration with the light power difference is given. The research result shows that, while the deflection of the silicon rectangular beam at center position is 0~10 μm, the corresponding acceleration value is 0~120 m·s -2, and the maximum acceleration detective value can be as much as 12g (g is the acceleration of gravity).
    Ying Zhang, Jun Wu, Jiangnan Wei, Zuwu Jin, Jianghuai Yao. Optic Fiber Acceleration Sensors Based on Micro-Electromechanical Systems Technology[J]. Acta Optica Sinica, 2018, 38(6): 0606003
    Download Citation