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    Journals >Acta Optica Sinica >Volume 32 >Issue 6 >Page 629003 > Article
    • Acta Optica Sinica
    • Vol. 32, Issue 6, 629003 (2012)
    Analysis of Composite Light Scattering Properties Between Wafers and Many Shapes of Particles with Different Positions
    Gong Lei1、*, Wu Zhensen2, and Gao Ming1
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201232.0629003 Cite this Article Set citation alerts
    Gong Lei, Wu Zhensen, Gao Ming. Analysis of Composite Light Scattering Properties Between Wafers and Many Shapes of Particles with Different Positions[J]. Acta Optica Sinica, 2012, 32(6): 629003 Copy Citation Text show less
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    Gong Lei, Wu Zhensen, Gao Ming. Analysis of Composite Light Scattering Properties Between Wafers and Many Shapes of Particles with Different Positions[J]. Acta Optica Sinica, 2012, 32(6): 629003
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