[1] Stearns D G, Rosen R S, Vernon S P. Multilayer mirror technology for soft X-ray projection lithography. Appl. Opt., 1993, 32(34):6952~6960
[2] Henke B L, Lee P, Tanaka T J et al.. The atomic scattering factor, f1+if2, for 94 elements and for the 100 to 2000 eV photon energy region. AIP Conference Proceedings, 1981, (75):340~388
[3] Michette A G. Optical Systems for Soft X Rays. New York: Plenum Press, 1986.