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Journals >Acta Optica Sinica >Volume 19 >Issue 6 >Page 800 > Article

Acta Optica Sinica
Vol. 19, Issue 6, 800 (1999)

Effects of Roughness on Characterization of Soft X-Ray Multilayer Coating

[in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese]. Effects of Roughness on Characterization of Soft X-Ray Multilayer Coating[J]. Acta Optica Sinica, 1999, 19(6): 800 Copy Citation Text

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Abstract

The effects of roughness on the reflectance of soft X-ray multilayer coating are discussed experimentally and theorectically. The suitable method for analyzing the effects of roughness, and the direction of studying the roughness are presented.

Keywords

reflectance roughness soft X-ray multilayer coating

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[in Chinese], [in Chinese], [in Chinese]. Effects of Roughness on Characterization of Soft X-Ray Multilayer Coating[J]. Acta Optica Sinica, 1999, 19(6): 800

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