Precision Analysis of Phase-Modulation Method for Measuring Stress Birefringence of Optical-Disk Substrate

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 15 >Issue 9 >Page 1258 > Article

Acta Optica Sinica
Vol. 15, Issue 9, 1258 (1995)

Precision Analysis of Phase-Modulation Method for Measuring Stress Birefringence of Optical-Disk Substrate

[in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese]. Precision Analysis of Phase-Modulation Method for Measuring Stress Birefringence of Optical-Disk Substrate[J]. Acta Optica Sinica, 1995, 15(9): 1258 Copy Citation Text

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Abstract

Polarized phase-modulation method is used to measure small birefringence with high precision. The effects on measuring results caused by some kinds of error sources in this method using PMCSA form for measuring opticaloisk substrate are analyzed. Results ontuined show that the presision is within 0.03 nm.

Keywords

precision analysis phase-modulation

[in Chinese], [in Chinese], [in Chinese]. Precision Analysis of Phase-Modulation Method for Measuring Stress Birefringence of Optical-Disk Substrate[J]. Acta Optica Sinica, 1995, 15(9): 1258

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