[1] E. L. Wooten, K. M. Kissa, A. Yi-Yan, E. J. Murphy, D. A. Lafaw, P. F. Hallemeier, D. Maack, D. V. Attanasio, D. J. Fritz, G. J. McBrien, D. E. Bossi. A review of lithium niobate modulators for fiber-optic communications systems. IEEE J. Sel. Top. Quantum Electron., 6, 69(2000).
[2] J. Capmany, D. Novak. Microwave photonics combines two worlds. Nat. Photon., 1, 319(2007).
[3] K. Noguchi, O. Mitomi, H. Miyazawa. Millimeter-wave Ti:LiNbO3 optical modulators. J. Lightwave Technol., 16, 615(1998).
[4] M. Bazzan, C. Sada. Optical waveguides in lithium niobate: recent developments and applications. Appl. Phys. Rev., 2, 040603(2015).
[5] X. Xiao, M. Li, L. Wang, D. Chen, Q. Yang, S. Yu. High speed silicon photonic modulators. Optical Fiber Communication Conference, Tu2H.1(2017).
[6] A. Khilo, C. M. Sorace, F. X. Kärtner. Broadband linearized silicon modulator. Opt. Express, 19, 4485(2011).
[7] J. Liu, G. Xu, F. Liu, I. Kityk, X. Liu, Z. Zhen. Recent advances in polymer electro-optic modulators. RSC Adv., 5, 15784(2015).
[8] H. Miura, F. Qiu, A. M. Spring, T. Kashino, T. Kikuchi, M. Ozawa, H. Nawata, K. Odoi, S. Yokoyama. High thermal stability 40 GHz electro-optic polymer modulators. Opt. Express, 25, 28643(2017).
[9] R. G. Walker. High-speed III-V semiconductor intensity modulators. IEEE J. Quantum Electron., 27, 654(1991).
[10] Y. Ogiso, Y. Hashizume, H. Tanobe, N. Nunoya, M. Ida, Y. Miyamoto, M. Ishikawa, J. Ozaki, Y. Ueda, H. Wakita, M. Nagatani, H. Yamazaki, M. Nakamura, T. Kobayashi, S. Kanazawa. 80-GHz bandwidth and 1.5-V Vπ InP-based IQ modulator. J. Lightwave Technol., 38, 249(2020).
[11] G. Poberaj, H. Hu, W. Sohler, P. Günter. Lithium niobate on insulator (LNOI) for micro-photonic devices. Laser Photon. Rev., 6, 488(2012).
[12] C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, M. Lončar. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. Nature, 562, 101(2018).
[13] M. He, M. Xu, Y. Ren, J. Jian, Z. Ruan, Y. Xu, S. Gao, S. Sun, X. Wen, L. Zhou, L. Liu, C. Guo, H. Chen, S. Yu, L. Liu, X. Cai. High-performance hybrid silicon and lithium niobate Mach–Zehnder modulators for 100 Gbit·s−1 and beyond. Nat. Photon., 13, 359(2019).
[14] X. Wang, P. O. Weigel, J. Zhao, M. Ruesing, S. Mookherjea. Achieving beyond-100-GHz large-signal modulation bandwidth in hybrid silicon photonics Mach Zehnder modulators using thin film lithium niobate. APL Photon., 4, 096101(2019).
[15] A. N. R. Ahmed, S. Nelan, S. Shi, P. Yao, A. Mercante, D. W. Prather. Subvolt electro-optical modulator on thin-film lithium niobate and silicon nitride hybrid platform. Opt. Lett., 45, 1112(2020).
[16] S. Sun, M. He, M. Xu, S. Gao, Z. Chen, X. Zhang, Z. Ruan, X. Wu, L. Zhou, L. Liu, C. Lu, C. Guo, L. Liu, S. Yu, X. Cai. Bias-drift-free Mach–Zehnder modulators based on a heterogeneous silicon and lithium niobate platform. Photon. Res., 8, 1958(2020).
[17] A. Honardoost, F. A. Juneghani, R. Safian, S. Fathpour. Towards subterahertz bandwidth ultracompact lithium niobate electrooptic modulators. Opt. Express, 27, 6495(2019).
[18] X. Liu, B. Xiong, C. Sun, Z. Hao, L. Wang, J. Wang, Y. Han, H. Li, J. Yu, Y. Luo. Low half-wave-voltage thin film LiNbO3 electro-optic modulator based on a compact electrode structure. Asia Communications and Photonics Conference (ACP/IPOC 2020), M4A.144(2020).
[19] X. Liu, B. Xiong, C. Sun, Z. Hao, L. Wang, J. Wang, Y. Han, H. Li, Y. Luo. Thin film LiNbO3 modulator based on LiNbO3-silica hybrid waveguide with narrow electrode gap. 2020 International Topical Meeting on Microwave Photonics (MWP), 166(2020).
[20] Y.-K. Wu, W.-S. Wang. Design and fabrication of sidewalls-extended electrode configuration for ridged lithium niobate electrooptical modulator. J. Lightwave Technol., 26, 286(2008).
[21] M. Jin, J. Chen, Y. Sua, P. Kumar, Y. Huang. Efficient electro-optical modulation on thin-film lithium niobate. Opt. Lett., 46, 1884(2021).
[22] X. Zhang, T. Miyoshi. Optimum design of coplanar waveguide for LiNbO3 optical modulator. IEEE Trans. Microwave Theory Tech., 43, 523(1995).
[23] P. Kharel, C. Reimer, K. Luke, L. He, M. Zhang. Breaking voltage–bandwidth limits in integrated lithium niobate modulators using micro-structured electrodes. Optica, 8, 357(2021).
[24] X. Liu, B. Xiong, C. Sun, Z. Hao, L. Wang, J. Wang, Y. Han, H. Li, J. Yu, Y. Luo. Thin film lithium niobate electro-optic modulator based on a slow wave structure. 14th Pacific Rim Conference on Lasers and Electro-Optics (CLEO PR 2020), C4C_3(2020).
[25] J. Shin, S. R. Sakamoto, N. Dagli. Conductor loss of capacitively loaded slow wave electrodes for high-speed photonic devices. J. Lightwave Technol., 29, 48(2011).
[26] L. He, M. Zhang, A. Shams-Ansari, R. Zhu, C. Wang, L. Marko. Low-loss fiber-to-chip interface for lithium niobate photonic integrated circuits. Opt. Lett., 44, 2314(2019).
