• Chinese Optics Letters
  • Vol. 19, Issue 6, 060016 (2021)
Xuecheng Liu, Bing Xiong*, Changzheng Sun, Jian Wang, Zhibiao Hao, Lai Wang, Yanjun Han, Hongtao Li, Jiadong Yu, and Yi Luo
Author Affiliations
  • Beijing National Research Center for Information Science and Technology (BNRist), Department of Electronic Engineering, Tsinghua University, Beijing 100084, China
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    DOI: 10.3788/COL202119.060016 Cite this Article Set citation alerts
    Xuecheng Liu, Bing Xiong, Changzheng Sun, Jian Wang, Zhibiao Hao, Lai Wang, Yanjun Han, Hongtao Li, Jiadong Yu, Yi Luo. Wideband thin-film lithium niobate modulator with low half-wave-voltage length product[J]. Chinese Optics Letters, 2021, 19(6): 060016 Copy Citation Text show less

    Abstract

    A novel thin-film lithium niobate (TFLN) electro-optic modulator is proposed and demonstrated. LiNbO3-silica hybrid waveguide is adopted to maintain low optical loss for an electrode spacing as narrow as 3 µm, resulting in a low half-wave-voltage length product of only 1.7 V·cm. Capacitively loaded traveling-wave electrodes are employed to reduce the microwave loss, while a quartz substrate is used in place of a silicon substrate to achieve velocity matching. The fabricated TFLN modulator with a 5-mm-long modulation region exhibits a half-wave voltage of 3.4 V and a merely less than 2 dB roll-off in an electro-optic response up to 67 GHz.

    Δneff=12Γγ33no3Vg,

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    Γ=gVEe|Eo|2dA|E0|2dA.

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    Zm=L0C0,

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    nm=cvm=cL0C0,

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    Xuecheng Liu, Bing Xiong, Changzheng Sun, Jian Wang, Zhibiao Hao, Lai Wang, Yanjun Han, Hongtao Li, Jiadong Yu, Yi Luo. Wideband thin-film lithium niobate modulator with low half-wave-voltage length product[J]. Chinese Optics Letters, 2021, 19(6): 060016
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