Researching | Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection

Journals >Advanced Photonics Nexus >Volume 1 >Issue 2 >Page 026004 > Article

Advanced Photonics Nexus
Vol. 1, Issue 2, 026004 (2022)

Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection | Article Video

Yu Lu^1,2,†, Lin Kai^1,2, Caiyi Chen^1,2, Qing Yang³..., Yizhao Meng^1,2, Yi Liu^1,2, Yang Cheng³, Xun Hou^1,2 and Feng Chen^1,2,*|Show fewer author(s)

Author Affiliations

¹Xi’an Jiaotong University, State Key Laboratory for Manufacturing System Engineering, Xi’an, China

²Xi’an Jiaotong University, School of Electronic Science and Engineering, Shaanxi Key Laboratory of Photonics Technology for Information, Xi’an, China

³Xi’an Jiaotong University, School of Mechanical Engineering, Xi’an, China

show less

DOI: 10.1117/1.APN.1.2.026004 Cite this Article Set citation alerts

Yu Lu, Lin Kai, Caiyi Chen, Qing Yang, Yizhao Meng, Yi Liu, Yang Cheng, Xun Hou, Feng Chen, "Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection," Adv. Photon. Nexus 1, 026004 (2022) Copy Citation Text

show less

References

[1] G. Laucirica et al. Biomimetic solid-state nanochannels for chemical and biological sensing applications. TrAC Trends Anal. Chem., 144, 116425(2021).

[2] L. Bocquet. Nanofluidics coming of age. Nat. Mater., 19, 254-256(2020).

[3] Y. Xu. Nanofluidics: a new arena for materials science. Adv. Mater., 30, 1702419(2018).

[4] M. Ali et al. Size-based cationic molecular sieving through solid-state nanochannels. Adv. Mater. Interfaces, 8, 2001766(2021).

[5] L. Ding et al. MXene molecular sieving membranes for highly efficient gas separation. Nat. Commun., 9, 155(2018).

[6] L. Chen et al. Unidirectional ion transport in nanoporous carbon membranes with a hierarchical pore architecture. Nat. Commun., 12, 4650(2021).

[7] S. Zhang et al. Highly rectifying fluidic diodes based on asymmetric layer-by-layer nanofilms on nanochannel membranes. Anal. Chem., 93, 4291-4298(2021).

[8] M. Nazari et al. Transport phenomena in nano/molecular confinements. ACS Nano, 14, 16348-16391(2020).

[9] P. Afonicheva et al. Creation of micro-and nanochannels on the surface of silicon chips by lithography methods and investigation of ion transport in channel. J. Phys. Conf. Ser., 2103, 012112(2021).

[10] S. Kim et al. Fabrication of a novel nanofluidic device featuring ZnO nanochannels. ACS Omega, 5, 3144-3150(2020).

[11] O. Vanderpoorten et al. Scalable integration of nano-, and microfluidics with hybrid two-photon lithography. Microsystems Nanoeng., 5, 40(2019).

[12] S. Amin et al. A nanofluidic knot factory based on compression of single DNA in nanochannels. Nat. Commun., 9, 1506(2018).

[13] C. Wang et al. Photoresponsive DNA materials and their applications. Chem. Soc. Rev., 51, 720-760(2022).

[14] D. Wu et al. In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting. Light Sci. Appl., 4, e228(2015).

[15] D. Wu et al. Bioinspired fabrication of high-quality 3D artificial compound eyes by voxel-modulation femtosecond laser writing for distortion-free wide-field-of-view imaging. Adv. Opt. Mater., 2, 751-758(2014).

[16] J. Yong et al. Nature-inspired superwettability achieved by femtosecond lasers. Ultrafast Sci., 2022, 9895418(2022).

[17] D. Tan et al. Photonic circuits written by femtosecond laser in glass: improved fabrication and recent progress in photonic devices. Adv. Photonics, 3, 024002(2021).

[18] M. Malinauskas et al. Ultrafast laser processing of materials: from science to industry. Light Sci. Appl., 5, e16133(2016).

[19] R. Stoian, J. P. Colombier. Advances in ultrafast laser structuring of materials at the nanoscale. Nanophotonics, 9, 4665-4688(2020).

[20] K. Sugioka, Y. Cheng. Ultrafast lasers-reliable tools for advanced materials processing. Light Sci. Appl., 3, e149(2014).

[21] A. Y. Vorobyev, C. Guo. Direct femtosecond laser surface nano/microstructuring and its applications. Laser Photonics Rev., 7, 385-407(2013).

[22] A. P. Joglekar et al. Optics at critical intensity: applications to nanomorphing. Proc. Natl. Acad. Sci. U. S. A., 101, 5856-5861(2004).

[23] Y. Liao et al. Femtosecond laser nanostructuring in porous glass with sub-50 nm feature sizes. Opt. Lett., 38, 187(2013).

[24] F. Chen et al. Rapid fabrication of a large-area close-packed quasi-periodic microlens array on BK7 glass. Opt. Lett., 39, 606(2014).

[25] S. He et al. Fabrication of three-dimensional helical microchannels with arbitrary length and uniform diameter inside fused silica. Opt. Lett., 37, 3825(2012).

[26] L. Xu et al. Enhanced light–matter interactions in dielectric nanostructures via machine-learning approach. Adv. Photonics, 2, 026003(2020).

[27] Z. Z. Li et al. O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment. Light Sci. Appl., 9, 41(2020).

[28] M. Lamperti et al. Invited article: filamentary deposition of laser energy in glasses with Bessel beams. APL Photonics, 3, 120805(2018).

[29] M. K. Bhuyan et al. 3D nano-fabrication using controlled bessel-glass interaction in ultra-fast modes. J. Laser Micro Nanoeng., 12, 274-280(2017).

[30] V. Garzillo et al. Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass. J. Appl. Phys., 120, 013102(2016).

[31] M. K. Bhuyan et al. Ultrafast laser nanostructuring in bulk silica, a ‘slow’ microexplosion. Optica, 4, 951(2017).

[32] S. Juodkazis et al. Laser-induced microexplosion confined in the bulk of a sapphire cystal: evidence of multimegabar pressures. Phys. Rev. Lett., 96, 1-4(2006).

[33] Y. Lu et al. Laser fabrication of nanoholes on silica through surface window assisted nano-drilling (SWAN). Nanomaterials, 11, 3340(2021).

[34] P. Polesana et al. Filamentation in Kerr media from pulsed Bessel beams. Phys. Rev. A: At., Mol., Opt. Phys., 77, 043814(2008).

[35] M. K. Bhuyan et al. Single-shot high aspect ratio bulk nanostructuring of fused silica using chirp-controlled ultrafast laser Bessel beams. Appl. Phys. Lett., 104, 021107(2014).

[36] A. Mermillod-Blondin et al. Dynamics of femtosecond laser induced voidlike structures in fused silica. Appl. Phys. Lett., 94, 041911(2009).

[37] P. K. Velpula et al. Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring. Laser Photonics Rev., 10, 230-244(2016).

[38] Q. Fan et al. Uniform long focal depth with centimeter-scale range produced by an aspherical mirror. Opt. Commun., 453, 124342(2019).

[39] L. Hanget?al.. Needles of light produced with a quasi-parabolic mirror. J. Opt. Soc. Am. A, 35, 174(2018).

[40] D. Panneton et al. Needles of light produced with a spherical mirror. Opt. Lett., 40, 419(2015).

[41] I. M. Burakov et al. Spatial distribution of refractive index variations induced in bulk fused silica by single ultrashort and short laser pulses. J. Appl. Phys., 101, 043506(2007).

[42] L. Sudrie et al. Femtosecond laser-induced damage and filamentary propagation in fused silica. Phys. Rev. Lett., 89, 186601(2002).

[43] L. Keldysh. Ionization in the field of a strong electromagnetic wave. Sov. Phys. JETP, 20, 1307-1314(1965).

Figures&Tables (5)

References (43)

Copy Citation Text

Yu Lu, Lin Kai, Caiyi Chen, Qing Yang, Yizhao Meng, Yi Liu, Yang Cheng, Xun Hou, Feng Chen, "Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection," Adv. Photon. Nexus 1, 026004 (2022)

Download Citation

Set citation alerts for the article

Set citation alerts for the article

Save the article for my favorites

Paper Information

Recommended Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology

Set citation alerts for the article

Please enter your email address