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Advanced Photonics Nexus
Vol. 1, Issue 2, 026004 (2022)

Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection | Article Video

Yu Lu^1、2、†, Lin Kai^1、2, Caiyi Chen^1、2, Qing Yang³, Yizhao Meng^1、2, Yi Liu^1、2, Yang Cheng³, Xun Hou^1、2, and Feng Chen^1、2、*

Author Affiliations

¹Xi’an Jiaotong University, State Key Laboratory for Manufacturing System Engineering, Xi’an, China

²Xi’an Jiaotong University, School of Electronic Science and Engineering, Shaanxi Key Laboratory of Photonics Technology for Information, Xi’an, China

³Xi’an Jiaotong University, School of Mechanical Engineering, Xi’an, China

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DOI: 10.1117/1.APN.1.2.026004 Cite this Article Set citation alerts

Yu Lu, Lin Kai, Caiyi Chen, Qing Yang, Yizhao Meng, Yi Liu, Yang Cheng, Xun Hou, Feng Chen. Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection[J]. Advanced Photonics Nexus, 2022, 1(2): 026004 Copy Citation Text

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References

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Yu Lu, Lin Kai, Caiyi Chen, Qing Yang, Yizhao Meng, Yi Liu, Yang Cheng, Xun Hou, Feng Chen. Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection[J]. Advanced Photonics Nexus, 2022, 1(2): 026004

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