Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection

Yu Lu; Lin Kai; Caiyi Chen; Qing Yang; Yizhao Meng; Yi Liu; Yang Cheng; Xun Hou; Feng Chen

doi:10.1117/1.APN.1.2.026004

Journals >Advanced Photonics Nexus >Volume 1 >Issue 2 >Page 026004 > Article

Advanced Photonics Nexus
Vol. 1, Issue 2, 026004 (2022)

Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection | Article Video

Yu Lu^1,2,†, Lin Kai^1,2, Caiyi Chen^1,2, Qing Yang³..., Yizhao Meng^1,2, Yi Liu^1,2, Yang Cheng³, Xun Hou^1,2 and Feng Chen^1,2,*|Show fewer author(s)

Author Affiliations

¹Xi’an Jiaotong University, State Key Laboratory for Manufacturing System Engineering, Xi’an, China

²Xi’an Jiaotong University, School of Electronic Science and Engineering, Shaanxi Key Laboratory of Photonics Technology for Information, Xi’an, China

³Xi’an Jiaotong University, School of Mechanical Engineering, Xi’an, China

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DOI: 10.1117/1.APN.1.2.026004 Cite this Article Set citation alerts

Yu Lu, Lin Kai, Caiyi Chen, Qing Yang, Yizhao Meng, Yi Liu, Yang Cheng, Xun Hou, Feng Chen, "Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection," Adv. Photon. Nexus 1, 026004 (2022) Copy Citation Text

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Article index updated: Jun. 14, 2025