Wenyuan Zhao, Mengyao Zhang, Ran Bi, Chuantao Zheng, Yiding Wang. Infrared Hf-doped ZnO Transparent Conductive Film[J]. Acta Optica Sinica, 2021, 41(20): 2031002
- Acta Optica Sinica
- Vol. 41, Issue 20, 2031002 (2021)
Fig. 1. Microstructure of the HZO films. (a) XRD spectra of films under different annealing temperatures; (b) XRD spectra of films under different oxygen flow rates; (c) crystalline size of films under different oxygen flow rates; (d) structure of the HfO2 (m phase), reproduced with permission
Fig. 2. Surface morphology of the HZO films under different oxygen flow rates. (a) 0 mL/min; (b) 0.2 mL/min; (c) 0.4 mL/min; (d) 0.6 mL/min; (e) 0.8 mL/min
Fig. 3. Optical properties of HZO films
Fig. 4. Electrical properties of the HZO films
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Table 1. Structural parameters of HZO films under different annealing conditions
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Table 2. Thickness of HZO films under different oxygen flow rates
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