• Acta Optica Sinica
  • Vol. 29, Issue 7, 1905 (2009)
Zhang Baoan*, Bao Lei, and Zhu Jianqiang
Author Affiliations
  • [in Chinese]
  • show less
    DOI: Cite this Article Set citation alerts
    Zhang Baoan, Bao Lei, Zhu Jianqiang. Influence of Slurry Particle Size on Materials Removal Rate and Roughness in High Power Laser Glass Material Polishing[J]. Acta Optica Sinica, 2009, 29(7): 1905 Copy Citation Text show less
    References

    [1] J. H. Campbell, R.A.Hawley-Fedder, C.J.Stolz et al.. NIF optical materials and fabrication technologies:An overview[C]. SPIE, 2004, 5341:81~101

    [2] Jiang Zhonghong. ICF Laser Glasses[J]. Chinese J. Lasers, 2006, 33(9):1265~1276

    [3] Liu Hongjie,Liu Lanqin,Su Jingqin et al.. Lens design based on ghost image and aberration analysis in high-power laser facility[J]. Acta Optica Sinica, 2008, 28(5): 976~980

    [4] W. howard Lowdermilk, David Milam. Laser-Induced Surface and Coating Damage[J]. IEEE Journal of Quantum Electronics, 1981, QE-17(9):1988~1903

    [5] H. Carchnov. Flat Glass Grinding and Polishing Technology[M]. Mao Wenjie, Yang Yingfang Transl. Beijing: China Industry Press, 1965. 84~225

    [6] M.J.Cumbo, D.Fairhurs, S. D. Jacobs et al.. Slurry particle size evolution during the polishing of optical glass[J]. Applied Optics, 1995, 34(19): 3743~3755

    [7] C. Wang, P. Sherman, A. Chandra et al.. Pad surface roughness and slurry particle size distribution effects on material removal rate in chemical mechanical planarization[J]. CIRP Annals-Manufacturing Technology, 2005, 54(1): 309~312

    [8] G. Bahar Basim, Brij M. Moudgil. Effect of soft agglomerates on CMP slurry performance[J]. Journal of Colloid and Interface Science, 2002, 256:137~142

    [9] Y. Xie, B. Bhushan. Effects of particle size, polishing pad and contact pressure in free abrasive polishing[J]. Wear, 1996, 200:281~295

    [10] C.J. Evansa, E. Paulb, D. Dornfeldc et al.. Material removal mechanisms in lapping and polishing[J]. CIRP Annals-Manufacturing Technology, 2003, 52(2):611~633

    [11] Jianfeng Luo, David A. Dornfeld. Effects of abrasive size distribution in chemical mechanical planarization: modeling and verification[J]. IEEE Transactions on Semiconductor Manufacuring, 2003, 16(3): 469~476

    [12] Zheng Wucheng. The relationship of physics-chemics characteristic and polishing ability for rareearths polishing powder[J]. Journal of RareEarths, 1981, (01):46~55

    [13] Han Jinghua, Yang Liming, Liu Mincai et al.. Parameter change law of polishing power and its influrence on the polishing effect during the optical manufacture[J]. Chinese Journal of Lasers, 2006, 33(Suppl.):196~199

    CLP Journals

    [1] Shi Chunyan, Yuan Jiahu, Wu Fan, Wan Yongjian. Research of Errors Analysis and Material Removal Stability in Fluid Jet Polishing[J]. Acta Optica Sinica, 2011, 31(1): 112012

    [2] Shi Chunyan, Yuan Jiahu, Wu Fan, Wan Yongjian. Analysis of Polishing Errors by Tool Paths and Optimization of Tool Paths[J]. Acta Optica Sinica, 2011, 31(8): 822003

    Zhang Baoan, Bao Lei, Zhu Jianqiang. Influence of Slurry Particle Size on Materials Removal Rate and Roughness in High Power Laser Glass Material Polishing[J]. Acta Optica Sinica, 2009, 29(7): 1905
    Download Citation