Nd-doped phosphate glass, quartz and BK7 are the main optical material useds in laser inertial confinement fusion（ICF）equipment. In Experiment, these three type glass were separately polished used polishing slurry with different average particle size. The relation of material remaval rate and average particle size was studied. Experiment indicates that special glass, for its typical physical and chemcal property, need corresponding average particle size of polishing slurry to get optimal polishing material removal rate. The influence on roughness of different slurry particle size for these three type glass is studied in experiment. Experiment data shows that the influences on roughness caused by slurry particle size are different for different glasses.