An Optical Design of 3-D Diffraction Grating in Soft X-Ray Spectra Based on Scalar Theory

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 18 >Issue 1 >Page 99 > Article

Acta Optica Sinica
Vol. 18, Issue 1, 99 (1998)

An Optical Design of 3-D Diffraction Grating in Soft X-Ray Spectra Based on Scalar Theory

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

show less

DOI: Cite this Article Set citation alerts

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Optical Design of 3-D Diffraction Grating in Soft X-Ray Spectra Based on Scalar Theory[J]. Acta Optica Sinica, 1998, 18(1): 99 Copy Citation Text

show less

Abstract

An asymptotic formalism used in the scalar domain is derived for studying the behavior of three-dimension diffraction gratings used in small groove pitch and near normal incidence for soft X-ray. The theory is applied to study 3-D lamellar gratings and results in a preliminary design.

Keywords

scalar domain soft X-ray diffraction gratings

Download Citation

Set citation alerts for the article

Tools

Set citation alerts for the article

Save the article for my favorites

Paper Information