Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique

Chen Min; Liu Xu; Li Haifeng

Journals >Acta Optica Sinica >Volume 22 >Issue 3 >Page 344 > Article

Acta Optica Sinica
Vol. 22, Issue 3, 344 (2002)

Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique

Chen Min^1、2、*, Liu Xu^1、2, and Li Haifeng^1、2

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¹[in Chinese]

²[in Chinese]

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Chen Min, Liu Xu, Li Haifeng. Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique[J]. Acta Optica Sinica, 2002, 22(3): 344 Copy Citation Text

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References

[1] Moore D F, Syms R R. Recent developments in micromachined silicon. Electron. and Commun. Engng. J., 1999, :261～270

Chen Min, Liu Xu, Li Haifeng. Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique[J]. Acta Optica Sinica, 2002, 22(3): 344

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