Yuejing Qi, Yuduo Pei, Mingcheng Zong, Jing Li, Jinxin Chen. Research Progress of Lithography Focusing and Leveling Measurement Technology[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922015
- Laser & Optoelectronics Progress
- Vol. 59, Issue 9, 0922015 (2022)
![Principle of the optical triangulation[5]](/richHtml/lop/2022/59/9/0922015/img_01.jpg)
Fig. 1. Principle of the optical triangulation[5]
![Schematic diagram of the photometric focusing. (a) Two quadrant photometric focusing[10]; (b) four quadrant photometric focusing[11]](/richHtml/lop/2022/59/9/0922015/img_02.jpg)
Fig. 2. Schematic diagram of the photometric focusing. (a) Two quadrant photometric focusing[10]; (b) four quadrant photometric focusing[11]
![Schematic diagram of focusing and leveling measurement by Canon company. (a) Spot projection marker[13]; (b) measuring device[14]](/Images/icon/loading.gif){kind=icon}
Fig. 3. Schematic diagram of focusing and leveling measurement by Canon company. (a) Spot projection marker[13]; (b) measuring device[14]
Fig. 4. Schematic diagram of focusing and leveling measurement by Nikon company. (a) Schematic diagram of slit array; (b) measuring device[17]
Fig. 5. Schematic diagram of the ASD. (a) Reflection of incident light on different photoresist films; (b) ASD at different wavelengths[3]
Fig. 6. Schematicdiagram of Nikon company reducing ASD error[27]
Fig. 7. Schematic diagram of Canon company optical correction system[28]
Fig. 8. Structure diagram of the SMEE focusing and leveling measurement device[29]
Fig. 9. Transmission focusing and leveling measurement device of Nikon company[31]
Fig. 10. Transmission focusing and leveling measurement device of Canon company[13]
Fig. 11. Transmission focusing and leveling measurement device of ASML company[23]
Fig. 12. Reflective focusing and leveling measurement device of ASML company[32]
Fig. 13. Schematic of optical path structure using photoelastic modulator of ASML company[34]
Fig. 14. Schematic of spatial beam splitting optical path structure using Wollaston prism of ASML company[24]
Fig. 15. Schematic of spatial beam splitting optical path structure using split image prism grating of ASML company[24]
Fig. 16. IMECAS reflective focusing and leveling measurement device[36]
Fig. 17. SMEE reflective focusing and leveling measurement device[37]
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