• Microelectronics
  • Vol. 52, Issue 1, 98 (2022)
FAN Lina1、2、3、4, WU Qiannan2、3、4、5, ZHANG Shiyi1、2、3、4, HOU Wen1、3、4, and LI Mengwei2、3、6、7
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
  • 5[in Chinese]
  • 6[in Chinese]
  • 7[in Chinese]
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    DOI: 10.13911/j.cnki.1004-3365.210322 Cite this Article
    FAN Lina, WU Qiannan, ZHANG Shiyi, HOU Wen, LI Mengwei. Design of a L-Band Double-Layer Interdigital Linear Phase MEMS Filter[J]. Microelectronics, 2022, 52(1): 98 Copy Citation Text show less
    References

    [2] RAO K S, VASANTHA K, KUMAR P A, et al. Design and of analysis of SPDT ohmic RF MEMS switch [J]. Microsyst Technol, 2020, 26(5): 1-7.

    [5] CIMOL B, JOHANSEN T K, VEGAS OLMOS J J. Microstrip linear phase low pass filter based on defected ground structures for partial response modulation [J]. Microwave & Opt Technol Lett, 2018, 60(1): 18-25.

    [6] HONG J S, MCERLEAN E P, KARYAMAPUD B. Eighteen-pole superconducting CQ filter for future wireless applications [J]. Microwave Antenn & Propagat IEE Proceed, 2015, 153(2): 205-211.

    [9] EKHTERAEI M, HAYATI M, SHAMA F. A compact lowpass filter with ultra-high figure-of-merit for integrating with class-F/F1 power amplifiers [J]. Analog Integr Circ & Signal Process, 2019, 99(14): 655-667.

    [10] GUPTA S C, KUMAR M, MEENA R S. Design & analysis of a microstrip line multi band UWB filter [J]. AEU - Int J Elec & Commun, 2016, 70(11): 1556-1564.

    [11] SARKAR D, MOYRA T, MURMU L. An ultra-wideband (UWB) bandpass filter with complementary split ring resonator for coupling improvement [J]. AEU - Int J Elec & Commun, 2017, 71(11): 89-95.

    [12] BEHZADI K, BAGHELANI M. Bandwidth controlled weakly connected MEMS resonators based narrowband filter [J]. IFT Digital Library, 2020, 14(8): 1265-1271.

    [18] LI M W, LIU Q H, WU Q N, et al. Broadband radio frequency MEMS series contact switch with low insertion loss [J].Microsyst Technol, 2019, 25(5): 1619-1625.

    FAN Lina, WU Qiannan, ZHANG Shiyi, HOU Wen, LI Mengwei. Design of a L-Band Double-Layer Interdigital Linear Phase MEMS Filter[J]. Microelectronics, 2022, 52(1): 98
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