Fabrication of micro-structure by using epoxy-based negative photoresist

[in Chinese]

Journals >Opto-Electronic Engineering >Volume 33 >Issue 11 >Page 36 > Article

Opto-Electronic Engineering
Vol. 33, Issue 11, 36 (2006)

Fabrication of micro-structure by using epoxy-based negative photoresist

[in Chinese]^1、2

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¹[in Chinese]

²[in Chinese]

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[in Chinese]. Fabrication of micro-structure by using epoxy-based negative photoresist[J]. Opto-Electronic Engineering, 2006, 33(11): 36 Copy Citation Text

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[in Chinese]. Fabrication of micro-structure by using epoxy-based negative photoresist[J]. Opto-Electronic Engineering, 2006, 33(11): 36

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