[in Chinese]. Error and Precision Evaluation of a System for Inspecting Surface of Optical Plane[J]. Acta Optica Sinica, 2003, 23(7): 879
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Through the analysis of the results obtained from inspecting actual surface of optical plane glass, the system theoretical error and methods to classify the type of surface shape in analysis of plane error with Zernike polynomials are studied in depth. A new theory and method are proposed by using error theory to appraise the precision of the laser digital system for inspecting surface of optical plane glass.