High-Q germanium optical nanocavity

Ting-Hui Xiao; Ziqiang Zhao; Wen Zhou; Mitsuru Takenaka; Hon Ki Tsang; Zhenzhou Cheng; Keisuke Goda

doi:10.1364/PRJ.6.000925

Journals >Photonics Research >Volume 6 >Issue 9 >Page 925 > Article

Photonics Research
Vol. 6, Issue 9, 925 (2018)

Ting-Hui Xiao^1、†, Ziqiang Zhao^2、†, Wen Zhou^3、†, Mitsuru Takenaka², Hon Ki Tsang³, Zhenzhou Cheng^1、*, and Keisuke Goda^1、4、5

Author Affiliations

¹Department of Chemistry, The University of Tokyo, Tokyo 113-0033, Japan

²Department of Electrical Engineering and Information Systems, The University of Tokyo, Tokyo 113-0033, Japan

³Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong SAR, China

⁴Department of Electrical Engineering, University of California, Los Angeles, California 90095, USA

⁵e-mail: goda@chem.s.u-tokyo.ac.jp

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DOI: 10.1364/PRJ.6.000925 Cite this Article Set citation alerts

Ting-Hui Xiao, Ziqiang Zhao, Wen Zhou, Mitsuru Takenaka, Hon Ki Tsang, Zhenzhou Cheng, Keisuke Goda. High-Q germanium optical nanocavity[J]. Photonics Research, 2018, 6(9): 925 Copy Citation Text

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Schematic of the monolithically integrated on-chip MIR germanium device that contains a high-Q nanocavity, two suspended-membrane waveguides, and two focusing subwavelength grating couplers. The inset to the bottom left shows the design of the high-Q nanocavity. The inset to the bottom right shows a cross-sectional view of a suspended-membrane waveguide.

Fig. 1. Schematic of the monolithically integrated on-chip MIR germanium device that contains a high-Q nanocavity, two suspended-membrane waveguides, and two focusing subwavelength grating couplers. The inset to the bottom left shows the design of the high-Q nanocavity. The inset to the bottom right shows a cross-sectional view of a suspended-membrane waveguide.

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SEM images of the MIR germanium device, including the high-Q nanocavity. (a) Top view of the device. Scale bar: 10 μm. (b) Top view of the high-Q nanocavity. Scale bar: 500 nm.

Fig. 2. SEM images of the MIR germanium device, including the high-Q nanocavity. (a) Top view of the device. Scale bar: 10 μm. (b) Top view of the high-Q nanocavity. Scale bar: 500 nm.

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Fig. 3. Experimental characterization of the MIR germanium device, including the high-Q nanocavity. (a) Measured transmission spectrum of the device (blue) and measured coupling efficiency of the focusing subwavelength grating couplers (red). (b) Lorentzian fitting of the measured nanocavity resonant mode. The inset shows the electric field magnitude distribution of the resonant mode.

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Geometry	Wavelength	$Q$ Factor	Cavity Type	Reference
Photonic crystal cavity	2.5 μm	$\sim 18,000$	Nanocavity	This work
Photonic crystal cavity	2.3 μm	$\sim 200$	Nanocavity	[24]
Racetrack microring	5.3 μm	$\sim 20,000$	Microcavity	[20]
Racetrack microring	3.8 μm	$\sim 5000$	Microcavity	[28]

Table 1. Comparison of MIR Germanium Cavities

Ting-Hui Xiao, Ziqiang Zhao, Wen Zhou, Mitsuru Takenaka, Hon Ki Tsang, Zhenzhou Cheng, Keisuke Goda. High-Q germanium optical nanocavity[J]. Photonics Research, 2018, 6(9): 925

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