Research Progress in Laser Surface Polishing of Hard and Brittle Materials

Yifan Xu; Jingzhen Shao; Ying Lin; Yangjie Shi; Xu Liang

doi:10.3788/LOP202259.1300003

Journals >Laser & Optoelectronics Progress >Volume 59 >Issue 13 >Page 1300003 > Article

Laser & Optoelectronics Progress
Vol. 59, Issue 13, 1300003 (2022)

Research Progress in Laser Surface Polishing of Hard and Brittle Materials

Yifan Xu^1、2, Jingzhen Shao¹, Ying Lin¹, Yangjie Shi^1、2, and Xu Liang^1、*

Author Affiliations

¹Anhui Institute of Optics and Fine Mechanics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, Anhui , China

²University of Science and Technology of China, Hefei 230026, Anhui , China

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DOI: 10.3788/LOP202259.1300003 Cite this Article Set citation alerts

Yifan Xu, Jingzhen Shao, Ying Lin, Yangjie Shi, Xu Liang. Research Progress in Laser Surface Polishing of Hard and Brittle Materials[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1300003 Copy Citation Text

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References

[2] Cao X W, Zhang L, Yu Y S et al. Application of micro-optical components fabricated with femtosecond laser[J]. Chinese Journal of Lasers, 44, 0102004(2017).

Yifan Xu, Jingzhen Shao, Ying Lin, Yangjie Shi, Xu Liang. Research Progress in Laser Surface Polishing of Hard and Brittle Materials[J]. Laser & Optoelectronics Progress, 2022, 59(13): 1300003

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