Shan Wang, Wei Zhao, Hualong Zhao, Feng Zhou, Guoqiang Liu, Xiaojun Yang. Large Depth-to-Diameter Ratio and Inverted Cone Micro-Hole Machining System with Controllable Trajectory and Its Application[J]. Laser & Optoelectronics Progress, 2022, 59(11): 1122002
- Laser & Optoelectronics Progress
- Vol. 59, Issue 11, 1122002 (2022)
Fig. 1. Optical path diagram of high speed trajectory controlled beam scanning processing
Fig. 2. Schematic diagram of combined angle of deflection wedge. (a) Relative deflection angle is 0°; (b) relative deflection angle is 180°; (c) relative deflection angle is 360°
Fig. 3. Schematic diagram of offset of parallel plate group. (a) Minimum offset state; (b) maximum offset state
Fig. 4. Schematic diagram of different hole types processed by femtosecond laser. (a) Cylindrical hole; (b) positive taper hole; (c) inverted taper hole
Fig. 5. Schematic diagram of cylindrical hole deep hole processing
Fig. 6. Nozzle hole processing effect. (a) Profile of nozzle; (b) enlarged view of nozzle outlet; (c) enlarged view of nozzle inlet
Fig. 7. Micro-hole with a diameter of 25 μm. (a) Front of micro-hole; (b) back of micro-hole
Fig. 8. Taper hole processing effect. (a) Front side of the -5° inverted taper hole; (b) reverse side of the -5° inverted taper hole; (c) front side of the +5° positive taper hole; (d) reverse side of the +5° positive taper hole
Fig. 9. Sectional view of inverted taper hole with a taper of -5°
Fig. 10. Sectional view of micro-hole with aspect ratio of 20∶1
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Table 1. Maximum machining diameter of common optical wedge
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Table 2. Nozzle diameter data of experimental sample
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