Mid-infrared active metasurface based on Si/VO2 hybrid meta-atoms

Tongtong Kang; Boyu Fan; Jun Qin; Weihao Yang; Shuang Xia; Zheng Peng; Bo Liu; Sui Peng; Xiao Liang; Tingting Tang; Longjiang Deng; Yi Luo; Hanbin Wang; Qiang Zhou; Lei Bi

doi:10.1364/PRJ.445571

Journals >Photonics Research >Volume 10 >Issue 2 >Page 373 > Article

Photonics Research
Vol. 10, Issue 2, 373 (2022)

Mid-infrared active metasurface based on Si/VO₂ hybrid meta-atoms

Tongtong Kang^1、2、†, Boyu Fan^3、†, Jun Qin^1、2, Weihao Yang^1、2, Shuang Xia^1、2, Zheng Peng^1、2, Bo Liu^4、5, Sui Peng^4、5, Xiao Liang^4、5, Tingting Tang^4、5, Longjiang Deng^1、2, Yi Luo⁶, Hanbin Wang^6、7, Qiang Zhou³, and Lei Bi^1、2、*

Author Affiliations

¹National Engineering Research Center of Electromagnetic Radiation Control Materials, University of Electronic Science and Technology of China, Chengdu 610054, China

²State Key Laboratory of Electronic Thin-Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China

³Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, China

⁴College of Optoelectronic Engineering, Chengdu University of Information Technology, Chengdu 610225, China

⁵State Key Laboratory of Vanadium and Titanium Resources Comprehensive Utilization, Panzhihua 617000, China

⁶Microsystem & Terahertz Research Center, China Academy of Engineering Physics (CAEP), Chengdu 610200, China

⁷Institute of Electronic Engineering, China Academy of Engineering Physics (CAEP), Mianyang 621900, China

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DOI: 10.1364/PRJ.445571 Cite this Article Set citation alerts

Tongtong Kang, Boyu Fan, Jun Qin, Weihao Yang, Shuang Xia, Zheng Peng, Bo Liu, Sui Peng, Xiao Liang, Tingting Tang, Longjiang Deng, Yi Luo, Hanbin Wang, Qiang Zhou, Lei Bi. Mid-infrared active metasurface based on Si/VO₂ hybrid meta-atoms[J]. Photonics Research, 2022, 10(2): 373 Copy Citation Text

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