• Journal of Semiconductors
  • Vol. 40, Issue 11, 111601 (2019)
Zhesi Chen1、2, Zhuo Chen1、2, Zhilong Song1、2, Wenhao Ye1、2, and Zhiyong Fan1、2
Author Affiliations
  • 1HKUST-Shenzhen Research Institute, Shenzhen 518057, China
  • 2Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology (HKUST), Hong Kong, China
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    DOI: 10.1088/1674-4926/40/11/111601 Cite this Article
    Zhesi Chen, Zhuo Chen, Zhilong Song, Wenhao Ye, Zhiyong Fan. Smart gas sensor arrays powered by artificial intelligence[J]. Journal of Semiconductors, 2019, 40(11): 111601 Copy Citation Text show less
    (Color online) Smart gas sensor array fabricated by different techniques assisted by artificial intelligence algorithms can find many real-life applications, exhibiting great potential as a mammalian olfactory system in the areas of air and water quality monitoring, non-invasive disease detection, and dangerous gases leakage alarming.
    Fig. 1. (Color online) Smart gas sensor array fabricated by different techniques assisted by artificial intelligence algorithms can find many real-life applications, exhibiting great potential as a mammalian olfactory system in the areas of air and water quality monitoring, non-invasive disease detection, and dangerous gases leakage alarming.
    (Color online) MOX sensor array fabrication method and morphology[10,11]: (a) FSP set-up, (b) SEM image of porous doped SnO2 film, (d) USP setup, (e) Cross-section of SnO2 nanotube decorated with Pt nanoparticles, gas sensor array of (c) doped SnO2 microsensors and (f) 3-D SnO2 nanotube.
    Fig. 2. (Color online) MOX sensor array fabrication method and morphology[10,11]: (a) FSP set-up, (b) SEM image of porous doped SnO2 film, (d) USP setup, (e) Cross-section of SnO2 nanotube decorated with Pt nanoparticles, gas sensor array of (c) doped SnO2 microsensors and (f) 3-D SnO2 nanotube.
    (Color online) (a) Sensor array fabrication methods and morphology[12, 13]: (a) an SEM image of organic functionalized gold nanoparticle film deposited between adjacent electrodes, (b) a TEM image of monolayer capped gold nanoparticles, (d) a TEM image of ultrathin silicon channel, (e) EDS indicating the elemental composition of a single Pd-Au CS-FET, gas sensor array of (c) gold nanoparticles, (f) CS-FET.
    Fig. 3. (Color online) (a) Sensor array fabrication methods and morphology[12, 13]: (a) an SEM image of organic functionalized gold nanoparticle film deposited between adjacent electrodes, (b) a TEM image of monolayer capped gold nanoparticles, (d) a TEM image of ultrathin silicon channel, (e) EDS indicating the elemental composition of a single Pd-Au CS-FET, gas sensor array of (c) gold nanoparticles, (f) CS-FET.
    (Color online) Artificial intelligence algorithms adopted in a gas sensor array.
    Fig. 4. (Color online) Artificial intelligence algorithms adopted in a gas sensor array.
    (Color online) Application of gas sensor array [11, 17, 98]. (a) Processes involved in breath testing, (b) gases associated with different kinds of diseases including cancer, (c) GPRS based air pollution monitoring system, (d) real-time indoor gas monitoring by smart phone in smart buildings.
    Fig. 5. (Color online) Application of gas sensor array [11, 17, 98]. (a) Processes involved in breath testing, (b) gases associated with different kinds of diseases including cancer, (c) GPRS based air pollution monitoring system, (d) real-time indoor gas monitoring by smart phone in smart buildings.
    Sensor typePrincipleAdvantageDisadvantage
    Thermal (catalytic)Catalytic combustion or reaction of target gases providing reaction heat which acts as the output signalLow cost, fast response, simpleDetection of flammable gas only, possibly be poisoned by catalyst.
    MassMonitoring gases using mass-sensitivity transducerHigh sensitivity, good reliability, fast responseThe piezoelectric substrate being influenced by temperature
    ElectrochemicalReacting with target gases at electrodes and producing electrical signals that are proportional to the gas concentrationLow concentration detection, wide range of detectable gases, good selectivityRelatively shorter lifetime, difficulty in revealing failure mode
    OpticalMeasuring optical absorption/emission scattering of target gasesHigh sensitivity, good stability, good selectivityHigh cost, influenced by ambient light
    SemiconductorGas adsorption and desorption at the surface of materials leading to electrical resistance change of the materialsLow cost, long lifetime, ease of miniaturization, wide range of detectable gasesPoor selectivity, humidity and temperature dependent, drift along time, normally working at high temperature
    Surface acoustic waveMeasuring the velocity or amplitude of acoustic wave propagating through or on the surface of materials which is sensitive to target gasesBattery-less, ease of miniaturization, selectivity depending on receptorComplex fabrication process
    Table 1. Summary of different types of gas sensor[3337].
    Zhesi Chen, Zhuo Chen, Zhilong Song, Wenhao Ye, Zhiyong Fan. Smart gas sensor arrays powered by artificial intelligence[J]. Journal of Semiconductors, 2019, 40(11): 111601
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