• Journal of Semiconductors
  • Vol. 44, Issue 7, 072803 (2023)
Zhuolin Jiang1, Xiangnan Li1, Xuanze Zhou2, Yuxi Wei1, Jie Wei1, Guangwei Xu2、*, Shibing Long2, and Xiaorong Luo1、**
Author Affiliations
  • 1State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
  • 2School of Microelectronics, University of Science and Technology of China, Hefei 230026, China
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    DOI: 10.1088/1674-4926/44/7/072803 Cite this Article
    Zhuolin Jiang, Xiangnan Li, Xuanze Zhou, Yuxi Wei, Jie Wei, Guangwei Xu, Shibing Long, Xiaorong Luo. Experimental investigation on the instability for NiO/β-Ga2O3 heterojunction-gate FETs under negative bias stress[J]. Journal of Semiconductors, 2023, 44(7): 072803 Copy Citation Text show less
    (Color online) (a) Cross-sectional view of the proposed NiO/β-Ga2O3 HJ-FET and the main fabrication process flows. Schematic representation of the testing method for the analysis instability under NBS at (b) single pulse, and (c) multiple pulses with a prolonged ts.
    Fig. 1. (Color online) (a) Cross-sectional view of the proposed NiO/β-Ga2O3 HJ-FET and the main fabrication process flows. Schematic representation of the testing method for the analysis instability under NBS at (b) single pulse, and (c) multiple pulses with a prolonged ts.
    (Color online) Measured DC characteristics: (a) log-scale transfer characteristics and (b) output characteristics.
    Fig. 2. (Color online) Measured DC characteristics: (a) log-scale transfer characteristics and (b) output characteristics.
    (Color online) Measured (a) VGS-IDS and (b) VGS-IGS curves after NBS as a function of tr. Extracted (c) ∆VTH and (d) IGS, off degradation ratio.
    Fig. 3. (Color online) Measured (a) VGS-IDS and (b) VGS-IGS curves after NBS as a function of tr. Extracted (c) ∆VTH and (d) IGS, off degradation ratio.
    (Color online) Measured (a) VGS-IDS and (b) VGS-IGS curves after NBS as a function of tr. Extracted (c) ∆VTH and (d) IGS, off degradation ratio.
    Fig. 4. (Color online) Measured (a) VGS-IDS and (b) VGS-IGS curves after NBS as a function of tr. Extracted (c) ∆VTH and (d) IGS, off degradation ratio.
    (Color online) (a) Measured VGS-IDS curves during NBS at VG,s = -20 V. (b) Extracted ∆VTH.
    Fig. 5. (Color online) (a) Measured VGS-IDS curves during NBS at VG,s = -20 V. (b) Extracted ∆VTH.
    (Color online) Schematic cross-sections of NiO/β-Ga2O3 HJ-FET (a) at initial, (b) under NBS, and (c) after NBS, respectively.
    Fig. 6. (Color online) Schematic cross-sections of NiO/β-Ga2O3 HJ-FET (a) at initial, (b) under NBS, and (c) after NBS, respectively.
    Zhuolin Jiang, Xiangnan Li, Xuanze Zhou, Yuxi Wei, Jie Wei, Guangwei Xu, Shibing Long, Xiaorong Luo. Experimental investigation on the instability for NiO/β-Ga2O3 heterojunction-gate FETs under negative bias stress[J]. Journal of Semiconductors, 2023, 44(7): 072803
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