Xiaodong Zhang, Lin Zhao, Zhiguo Han, Yanan Feng, Suoyin Li. Line Spacing Measurement Method Based on Image Processing[J]. Laser & Optoelectronics Progress, 2020, 57(1): 011201
- Laser & Optoelectronics Progress
- Vol. 57, Issue 1, 011201 (2020)
Fig. 1. Standard line spacing sample with micro-nano size
Fig. 2. CD-SEM measurement system
Fig. 3. Sample obtained by CD-SEM
Fig. 4. Oblique detection method
Fig. 5. Baseline detection method
Fig. 6. NMM system
|
Table 1. Measurement values of two algorithms
|
Table 2. Comparison of measurement results of two algorithms
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20