Phase-shifting interferometry to the flatness of a compact disk

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 31 >Issue 1 >Page 29 > Article

Opto-Electronic Engineering
Vol. 31, Issue 1, 29 (2004)

Phase-shifting interferometry to the flatness of a compact disk

[in Chinese]^1、2, [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese]. Phase-shifting interferometry to the flatness of a compact disk[J]. Opto-Electronic Engineering, 2004, 31(1): 29 Copy Citation Text

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References

[2] MALACARA D. Optical Shop Testing [M]. New York:John Wiley and Sons, 1992.

[3] CHENG Y Y,WYANT J C. Two-wavelength phase shifting interferometer [J]. Appl. Opt,1984, 23(23): 4539-4543.

[7] SWANTNER W H, LOWERY W H. Zernike-Tatian polynomials for interferogram reduction [J]. Appl.Opt ,1980, 19(1): 161-163.

[8] MAHAJIAN V N. Zernike annular polynomials for imaging systems with annular pupils [J]. JOSA,1981, 71(1): 75-85.

[in Chinese], [in Chinese], [in Chinese]. Phase-shifting interferometry to the flatness of a compact disk[J]. Opto-Electronic Engineering, 2004, 31(1): 29

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