Phase-shifting interferometry to the flatness of a compact disk

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 31 >Issue 1 >Page 29 > Article

Opto-Electronic Engineering
Vol. 31, Issue 1, 29 (2004)

Phase-shifting interferometry to the flatness of a compact disk

[in Chinese]^1、2, [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese]. Phase-shifting interferometry to the flatness of a compact disk[J]. Opto-Electronic Engineering, 2004, 31(1): 29 Copy Citation Text

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Abstract

[in Chinese], [in Chinese], [in Chinese]. Phase-shifting interferometry to the flatness of a compact disk[J]. Opto-Electronic Engineering, 2004, 31(1): 29

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