[1] Buonassisi T, Istratov A A, Heuer M et al. Synchrotron-based investigations of the nature and impact of iron contamination in multicrystalline silicon solar cells[J]. Journal of Applied Physics, 97, 074901(2005).

[2] Zhu J Y, Zhang S C, Xie S S et al. Nanofabrication of 50 nm zone plates through e-beam lithography with local proximity effect correction for X-ray imaging[J]. Chinese Physics B, 29, 047501(2020).

[3] Fu S J, Hong Y L, Tao X M et al. Fabrication of soft X-ray condenser zone plates[J]. Acta Optica Sinica, 15, 1148-1150(1995).

[4] Hu C H, Zhao T, Li H et al. Research progress on X-ray phase contrast imaging[J]. International Journal of Biomedical Engineering, 31, 36-40(2008).

[5] Keskinbora K, Robisch A L, Mayer M et al. Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV[J]. Optics Express, 22, 18440-18453(2014).

[6] Wu X, Chen J N, Zhu X L et al[J]. Fabrication of high-aspect-ratio hard X-ray focusing zone plates Microfabrication Technology, 2008, 9-11.

[7] Gleber S C, Wojcik M, Liu J et al. Fresnel zone plate stacking in the intermediate field for high efficiency focusing in the hard X-ray regime[J]. Optics Express, 22, 28142-28153(2014).

[8] Koyama T, Takano H, Konishi S et al. Circular multilayer zone plate for high-energy X-ray nano-imaging[J]. The Review of Scientific Instruments, 83, 013705(2012).

[9] Kirz J. Phase zone plates for X rays and the extreme UV[J]. Journal of the Optical Society of America, 64, 301-309(1974).

[10] Eberl C, Döring F, Liese T et al. Fabrication of laser deposited high-quality multilayer zone plates for hard X-ray nanofocusing[J]. Applied Surface Science, 307, 638-644(2014).

[11] Mayer M, Keskinbora K, Grévent C et al. Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling[J]. Journal of Synchrotron Radiat, 20, 433-440(2013). http://europepmc.org/articles/PMC3628450/

[12] Xiao K, Liu Y, Xu X D et al. Fabrication of soft X-ray phase condenser zone plates[J]. Acta Optica Sinica, 25, 1722-1723(2005).

[13] Liu Q, Wu J H. Analysis and comparison of the scalar diffraction theory and coupled-wave theory about grating[J]. Laser Journal, 25, 31-34(2004).

[14] Xiao K, Liu Y, Chen L et al. Characterization of relative diffraction performance of soft X-ray zone plates by experiment[J]. Acta Optica Sinica, 26, 1598-1600(2006).

[15] Zhu Y, Zhang Y J, Zhao Y. Vertical diffraction of multi-step hybrid Fresnel zone plates[J]. Laser & Optoelectronics Progress, 51, 060501(2014).

[16] Ala-Laurinaho J, Hirvonen T, Tuovinen J et al. Numerical modeling of a nonuniform grating with FDTD[J]. Microwave and Optical Technology Letters, 15, 134-139(1997).

[17] Sarkar S S, Solak H H, Raabe J et al. Fabrication of Fresnel zone plates with 25 nm zone width using extreme ultraviolet holography[J]. Microelectronic Engineering, 87, 854-858(2010).

[18] Maser J. Evaluation of the efficiency of zone plates with high aspect ratios by application of coupled wave theory[M]. ∥Michette A G, Morrison G R, Buckley C J. X-ray microscopy III. Springer series in optical sciences, Berlin, Heidelberg: Springer, 67, 104-106(1992).

[19] Schneider G, Rehbein S, Werner S. Volume effects in zone plates[M]. ∥Erko A, Idir M, Krist T, et al. Modern developments in X-ray and neutron optics. Springer series in optical science. Berlin, Heidelberg: Springer, 137, 137-171(2008).

[20] Lu W E, Xia Y, Kong X D, its preparation method: CN108520791A[P] et al. -09-11(2018).