Design of Hard X-Ray Fresnel Zone Plates Based on Rigorous Coupled Wave Theory

Yazeng Gao; Lujie Wu; Weier Lu; Hongyao Liu; Yang Xia; Lili Zhao; Yanli Li; Xiangdong Kong; Li Han

doi:10.3788/AOS202141.1111002

Journals >Acta Optica Sinica >Volume 41 >Issue 11 >Page 1111002 > Article

Acta Optica Sinica
Vol. 41, Issue 11, 1111002 (2021)

Design of Hard X-Ray Fresnel Zone Plates Based on Rigorous Coupled Wave Theory

Yazeng Gao^1、2、4, Lujie Wu^1、5, Weier Lu^{1、2、4、*}, Hongyao Liu^1、2、**, Yang Xia^1、2、4, Lili Zhao^1、2、4, Yanli Li³, Xiangdong Kong³, and Li Han³

Author Affiliations

¹Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

²School of Microelectronics, University of Chinese Academy of Sciences, Beijing 101407, China

³Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100080, China

⁴Beijing Engineering Research Center for Microelectronics Preparation Equipment, Beijing 100029, China

⁵School of Science, Beijing Jiaotong University, Beijing 100044, China

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DOI: 10.3788/AOS202141.1111002 Cite this Article Set citation alerts

Yazeng Gao, Lujie Wu, Weier Lu, Hongyao Liu, Yang Xia, Lili Zhao, Yanli Li, Xiangdong Kong, Li Han. Design of Hard X-Ray Fresnel Zone Plates Based on Rigorous Coupled Wave Theory[J]. Acta Optica Sinica, 2021, 41(11): 1111002 Copy Citation Text

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Fig. 1. Structure of the hard X-ray FZP. (a) Schematic diagram of the PZP structure; (b) SEM image

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$Variation curves of the diffraction efficiencies of different combination FZP with thickness. (a) Energy of the light source is 8 keV; (b) energy of the light source is 15 keV$

Fig. 2. Variation curves of the diffraction efficiencies of different combination FZP with thickness. (a) Energy of the light source is 8 keV; (b) energy of the light source is 15 keV

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$Relationship between maximum diffraction efficiency, optimal thickness and source energy$