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    Journals >Acta Optica Sinica >Volume 34 >Issue 10 >Page 1022004 > Article
    • Acta Optica Sinica
    • Vol. 34, Issue 10, 1022004 (2014)
    Source Optimization Method of Lithography Tools Based on Quadratic Programming
    Yan Guanyong1、2、*, Li Sikun1, and Wang Xiangzhao1、2
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201434.1022004 Cite this Article Set citation alerts
    Yan Guanyong, Li Sikun, Wang Xiangzhao. Source Optimization Method of Lithography Tools Based on Quadratic Programming[J]. Acta Optica Sinica, 2014, 34(10): 1022004 Copy Citation Text show less
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    Yan Guanyong, Li Sikun, Wang Xiangzhao. Source Optimization Method of Lithography Tools Based on Quadratic Programming[J]. Acta Optica Sinica, 2014, 34(10): 1022004
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