Process on ethanol assisted laser ablation dicing of silicon wafer

Wentao Tian; Weicheng Liu; Xuhui Sun; Hongyu Zheng; Zhiwen Wang

doi:10.3788/IRLA20210333

[1] Y Wang, C Q Li, H Z Zhang, et al. Research on unconventional laser machining. Infrared and Laser Engineering, 40, 448-454(2011).

[2] Z Wang, W J Fu, R Z Zhang. Numerical simulation of femtosecond laser multi-pulse ablation of metal iron. Infrared and Laser Engineering, 48, 0706002(2019).

[3] M Guo, Y X Zhang, W Y Zhang, et al. Thermal damage of monocrystalline silicon irradiated by long pulse laser. Infrared and Laser Engineering, 49, 0305002(2020).

[4] W Yang, X H Peng, J Zhang. Study of laser cutting technology for silicon wafer under water. Chinese Journal of Lasers, 36, 3064-3067(2009).

[5] H K Huang, J C Lai, J Lu, et al. Study on Nd: YAG ns pulsed laser ablation of Ge target in water. Infrared and Laser Engineering, 49, 20190498(2020).

[6] X Zhong, J Eshraghi, P Vlachos, et al. A model for a laser-induced cavitation bubble. International Journal of Multiphase Flow, 132, 103433(2020).

[7] S G Avila, C D Ohl. Fragmentation of acoustically levitating droplets by laser-induced cavitation bubbles. Journal of Fluid Mechanics, 805, 551-576(2016).

[8] X D Ren, H He, Y Q Tong, et al. Experimental investigation on dynamic characteristics and strengthening mechanism of laser-induced cavitation bubbles. Ultrasonics Sonochemistry, 32, 218-223(2016).

[9] W Charee, V Tangwarodomnukun, C Dumkum. Ultrasonic-assisted underwater laser micromachining of silicon. Journal of Materials Processing Technology, 231, 209-220(2016).

[10] J Bao, Y Long, Y Tong, et al. Experiment and simulation study of laser dicing silicon with water-jet. Applied Surface Science, 387, 491-496(2016).

[11] A Kanitz, M R Kalus, E L Gurevich, et al. Review on experimental and theoretical investigations of the early stage, femtoseconds to microseconds processes during laser ablation in liquid-phase for the synthesis of colloidal nanoparticles. Plasma Sources Science and Technology, 28, 103001(2019).

[12] B A De, M Sansone, L D'Alessio, et al. Dynamics of laser-induced bubble and nanoparticles generation during ultra-short laser ablation of Pd in liquid. Journal of Physics D:Applied Physics, 46, 445301(2013).

[13] P Wagener, S Ibrahimkutty, A Menzel, et al. Dynamics of silver nanoparticle formation and agglomeration inside the cavitation bubble after pulsed laser ablation in liquid. Physical Chemistry Chemical Physics Pccp, 15, 3068-3074(2013).

[14] A D Giacomo, M Dell'Aglio, A Santagata, et al. Cavitation dynamics of laser ablation of bulk and wire-shaped metals in water during nanoparticles production. Physical Chemistry Chemical Physics Pccp, 15, 3083-3092(2013).

[15] L T Fan, X G Yuan, C X Zhou, et al. Contact Angle of Ethanol and n‐Propanol Aqueous Solutions on Metal Surfaces. Chemical Engineering & Technology, 34, 1535-1542(2011).

[16] S Barcikowski, D S Zhang, B Gökce, et al. Debris-free rear-side picosecond laser ablation of thin germanium wafers in water with ethanol. Applied Surface Science:A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials, 367, 222-230(2016).

[17] Z G Ma, J A Wang, Y Yu, et al. Light extinction properties of underwater bubble films. Laser Technology, 33, 18-20(2009).