Zhiyuan Qu, Ping Lu, Yujian Li, Xin Fu, Wanjin Zhang, Deming Liu, Jiangshan Zhang. Low-frequency acoustic Fabry–Pérot fiber sensor based on a micromachined silicon nitride membrane[J]. Chinese Optics Letters, 2020, 18(10): 101201
- Chinese Optics Letters
- Vol. 18, Issue 10, 101201 (2020)
Fig. 1. (a) Sensitivity and resonant frequency of the membrane with difference tensile strain; (b) frequency response of the membrane with different densities.
Fig. 2. Simulation results of three-beam interference: (a) the original interference spectrum and its Fourier transform; (b) the interference extinction ratio under different FP cavity lengths
Fig. 3. Schematic diagram of membrane fabrication.
Fig. 4. (a) Schematic diagram of sensor structure; (b) photo of the SiN-MEMS sensor; (c) reflection spectrum and spatial frequency spectrum of the sensor.
Fig. 5. (a) Experimental setup of frequency response testing; (b) picture of the low-frequency comparison coupler.
Fig. 6. (a) Result of acoustic signal demodulation of SiN-MEMS sensor; (b) FFT spectra of demodulation results.
Fig. 7. (a) SNR of FFT result; (b) phase sensitivity and noise characteristics of SiN-MEMS sensor; (c) sensitivity comparison of simulation to experimental data.
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