Low-frequency acoustic Fabry–P&#233;rot fiber sensor based on a micromachined silicon nitride membrane

Zhiyuan Qu; Ping Lu; Yujian Li; Xin Fu; Wanjin Zhang; Deming Liu; Jiangshan Zhang

doi:10.3788/COL202018.101201

Journals >Chinese Optics Letters >Volume 18 >Issue 10 >Page 101201 > Article

Chinese Optics Letters
Vol. 18, Issue 10, 101201 (2020)

Low-frequency acoustic Fabry–Pérot fiber sensor based on a micromachined silicon nitride membrane

Zhiyuan Qu¹, Ping Lu^1、*, Yujian Li¹, Xin Fu¹, Wanjin Zhang¹, Deming Liu¹, and Jiangshan Zhang²

Author Affiliations

¹Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Laboratory for Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China

²Department of Electronics and Information Engineering, Huazhong University of Science and Technology, Wuhan 430074, China

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DOI: 10.3788/COL202018.101201 Cite this Article Set citation alerts

Zhiyuan Qu, Ping Lu, Yujian Li, Xin Fu, Wanjin Zhang, Deming Liu, Jiangshan Zhang. Low-frequency acoustic Fabry–Pérot fiber sensor based on a micromachined silicon nitride membrane[J]. Chinese Optics Letters, 2020, 18(10): 101201 Copy Citation Text

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