Wenxin Jia, Sen Han, Linghua Zhang, Bo Han, Dayong Zhu, Huaikang Zhu. Measurement Method and Alignment Error Analysis of Off-Axis Elliptical Cylindrical Mirror[J]. Acta Optica Sinica, 2021, 41(20): 2012004
- Acta Optica Sinica
- Vol. 41, Issue 20, 2012004 (2021)
Fig. 1. Sectional view of binary ring grating
Fig. 2. Measurement principle diagram
Fig. 3. Off-axis elliptically cylindrical mirror placed on the cylindrical holding device
Fig. 4. Experimental setup
Fig. 5. Experimental measurement results. (a) Actual measurement of interference fringe pattern; (b) measurement topography; (c) Zernike coefficients; (d) surface parameters
Fig. 6. Adjusted results. (a) Actual measurement of interference fringe pattern; (b) measurement topography; (c) Zernike coefficients; (d) surface parameters
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Table 1. The adjustment amount in experiment
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