Yonggang Yan, Zhengxing Wu, Zhi Li, Yuqi Tang. Traceable analysis of the performance of an ultra-fine positioning stage using a differential plane mirror interferometer[J]. Infrared and Laser Engineering, 2021, 50(11): 20210070
- Infrared and Laser Engineering
- Vol. 50, Issue 11, 20210070 (2021)
Fig. 1. Traceable calibration layout for quality control of micro-/nano-positioining stages
Fig. 2. Interferometric calibration setup
Fig. 3. Experimental investigation of the quasi-static performance of the interferometric calibration setup
Fig. 4. Experimental investigation of the z -axis motion performance of the interferometric calibration setup
Fig. 5. Interferometric calibration of a piezostage working in closed-loop mode
Fig. 6. Interferometric calibration of a piezostage working in open-loop mode
Fig. 7. Closed-loop displacement of the piezostage measured by the integrated PicoQ® Sensor and the interferometer, respectively
Fig. 8. Interferometric calibration for repeatability of the piezostage
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