The Effect of Mirror Undulation on Optical Property of Si-base MEMS Optical Tunable Filter

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Journals >Acta Photonica Sinica >Volume 32 >Issue 6 >Page 661 > Article

Acta Photonica Sinica
Vol. 32, Issue 6, 661 (2003)

The Effect of Mirror Undulation on Optical Property of Si-base MEMS Optical Tunable Filter

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Effect of Mirror Undulation on Optical Property of Si-base MEMS Optical Tunable Filter[J]. Acta Photonica Sinica, 2003, 32(6): 661 Copy Citation Text

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References

[1] Tran A T T D, Lo Y H, Zhu Z H. Surface micromachined Fabry-Perot tunable filter.IEEE Photonics Technology Letters,1996,8(3): 393～395

[2] Sugihwo F, Larson M C, Harris J S. Micromachined widely tunable vertical cavity laser diodes. Journal of Micro-Electro-Mechanical Systems, 1998,7(1): 48～55

[3] Tayebati P, Wang P, Azimi M. Microelectromechanical tunable filter with stable half symmetric cavity.Electronics Letters, 1998,20(34):1967～1968

[4] Born M, Wolf E. Principles of Optics. Pergamon, Oxford, 1991

CLP Journals

[1] Guo Zhihui, Li Yonghua, Yang Heng, Zhong Shaolong. Tunable Fabry-Perot Optical Filter Based on Micro-Electro Mechanical System[J]. Chinese Journal of Lasers, 2017, 44(6): 604007

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