The Effect of Mirror Undulation on Optical Property of Si-base MEMS Optical Tunable Filter[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
Acta Photonica Sinica
- Publication Date: Jan. 01, 1900
- Vol. 32, Issue 6, 661 (2003)