The Effect of Mirror Undulation on Optical Property of Si-base MEMS Optical Tunable Filter

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Journals >Acta Photonica Sinica >Volume 32 >Issue 6 >Page 661 > Article

Acta Photonica Sinica
Vol. 32, Issue 6, 661 (2003)

The Effect of Mirror Undulation on Optical Property of Si-base MEMS Optical Tunable Filter

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Effect of Mirror Undulation on Optical Property of Si-base MEMS Optical Tunable Filter[J]. Acta Photonica Sinica, 2003, 32(6): 661 Copy Citation Text

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Fabry-Perot