Fig. 1. Schematic structure of optical navigation device. (a) Profile of the device; (b) picture of the device; (c) initial state; (d) applying external voltage

Fig. 2. Analysis of force balance of optical tracking. (a) Equilibrium state when applying external voltage; (b) liquid 3 and mirror contact part

Fig. 3. Results of height change of the liquid 3 under different voltages

Fig. 4. Heightof liquid 3 versus voltage

Fig. 5. Experimental setup of optical tracking angle measurement

Fig. 6. Experimental results of optical tracking angle measurement. (a) Variation of tilt angle of mirror under different voltages; (b) incident beam deflection under different voltages; (c) relationship between optical tracking angle and applied voltage; (d) relationship between deflection angle of incident beam and applied voltage