Cheng Jin, Zhou Shun, Xu Naitao, Lu Anjiang, Liu Weiguo. Low-Cost Two-Dimensional Laser Scanning Projection Technology[J]. Laser & Optoelectronics Progress, 2021, 58(1): 123001
- Laser & Optoelectronics Progress
- Vol. 58, Issue 1, 123001 (2021)
Fig. 1. MEMS laser projection module. (a) Actual scanning module; (b) two-dimensional MEMS scanning micromirror chip
Fig. 2. Structure of two-dimensional MEMS scanning device
Fig. 3. Structure of one-dimensional electrostatic MEMS scanning micromirror
Fig. 4. Rotational resonance mode of MEMS scanning micromirror under different frequencies. （a） 28.186 kHz ;（b） 3.162 kHz
Fig. 5. Manufacturing process of MEMS scanning micromirror
Fig. 6. Physical images of MEMS scanning micromirror in different directions. (a) X axis; (b) Y axis
Fig. 7. MEMS two-dimensional scanning device module before and after packaging. (a) Before packaging; (b) after packaging
Fig. 8. Relationship between voltage and optical angle. (a) X axis; (b) Y axis
Fig. 9. Optical angle test equipment and Lissajous pattern
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Table 1. Key parameters of MEMS scanning micromirror
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