The traditional solution uses a single two-dimensional MEMS （Micro-Electro-Mechanical System） micromirror as the scanning structure, but its manufacturing process is complicated and there is a problem of high failure rate in the working process. In view of this, two cheaper one-dimensional electrostatic MEMS micromirrors are packaged and combined to obtain a two-dimensional scanning device module. Through the research of device design and manufacturing process, a MEMS two-dimensional scanning device model is finally developed. The entire device module has the advantages of compact structure, simple manufacturing process, low cost, high reliability and easy mass manufacturing. Experimental results show that the scanning optical angle of the MEMS two-dimensional scanning device module in the X-axis direction can reach 48.0° （driving frequency is 28.25 kHz, voltage is 160 V）, and the scanning optical angle in the Y-axis direction can reach 12.5° （driving frequency is 3.80 kHz, voltage is 160 V）, and its optical performance is comparable to that of a single two-dimensional MEMS micromirror, which can meet the needs of the field of micro laser projection.