Gang Chen, Dingquan Liu, Chong Ma, Kaixuan Wang, Li Zhang, Lingshan Gao. Optical Spectra and Surface Morphologies of Near-Infrared Narrow Band-Pass Filters Using Dual Ion Beam Sputtering[J]. Acta Optica Sinica, 2020, 40(21): 2131001
- Acta Optica Sinica
- Vol. 40, Issue 21, 2131001 (2020)
Fig. 1. Spectral constant curves of Nb2O5 and SiO2 thin films. (a) Refractive index n; (b) extinction coefficients k
Fig. 2. Designed transmittance curves of two filters. (a) 1375 nm channel; (b) 1610 nm channel
Fig. 3. Schematic DIBS experimental setup
Fig. 4. Designed and tested optical transmittance curves of 1375 nm filter. (a) Test range of 900-1800 nm;(b) test range of 1350-1400 nm
Fig. 5. Designed and tested transmittance curves of 1610 nm filter. (a) Test range of 900-1800 nm; (b) test range of 1520-1700 nm
Fig. 6. Optical microscope images of the surface of filter prepared by IBAD. (a) 1610 nm channel; (b) 1375 nm channel
Fig. 7. AFM images of the surface of filter prepared by IBAD. (a) 1610 nm channel; (b) 1375 nm channel
Fig. 8. Optical images of the surface of filter prepared by DIBS. (a) 1610 nm channel; (b) 1375 nm channel
Fig. 9. AFM images of the surface of filter prepared by DIBS. (a) 1610 nm channel; (b) 1375 nm channel
Fig. 10. Output electric signals of detector after coupling with filters. (a) 1375 nm channel; (b) 1610 nm channel
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Table 1. Relevant parameters for preparing filters using DIBS technology
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Table 2. Surface roughness of filters prepared by IBAD and DIBS
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