• Acta Optica Sinica
  • Vol. 40, Issue 21, 2131001 (2020)
Gang Chen1、3, Dingquan Liu1、2、3、*, Chong Ma1, Kaixuan Wang1、2, Li Zhang1, and Lingshan Gao1、3
Author Affiliations
  • 1Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
  • 2School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/AOS202040.2131001 Cite this Article Set citation alerts
    Gang Chen, Dingquan Liu, Chong Ma, Kaixuan Wang, Li Zhang, Lingshan Gao. Optical Spectra and Surface Morphologies of Near-Infrared Narrow Band-Pass Filters Using Dual Ion Beam Sputtering[J]. Acta Optica Sinica, 2020, 40(21): 2131001 Copy Citation Text show less

    Abstract

    To investigate water vapor, methane (CH4), and carbon dioxide (CO2) concentrations in the atmosphere, two near-infrared narrow band-pass filters are fabricated on sapphire substrates. The central wavelengths are 1375 nm and 1610 nm and bandwidths are 15 nm and 60 nm, with average transmission of 95%. Nb2O5/SiO2 Fabry-Perot multilayer filters are optimized and deposited using dual ion beam sputtering. Compared to electron beam evaporated films, the dual ion beam sputtered films have significantly improved surface quality and reduced defects, and their root-mean-square surface roughness is reduced to below 1 nm, which significantly improves the uniformity of electric signals when coupled with a photodetector.
    Gang Chen, Dingquan Liu, Chong Ma, Kaixuan Wang, Li Zhang, Lingshan Gao. Optical Spectra and Surface Morphologies of Near-Infrared Narrow Band-Pass Filters Using Dual Ion Beam Sputtering[J]. Acta Optica Sinica, 2020, 40(21): 2131001
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